MultiMetrixs Family of Sensors:
cost-effective wafer mapping and positioning
MultiMetrixs offers a family of sensors to meet
most exact automation requirements of any OEM or end-user.
Most of the sensors can be stand-alone products or
integrated with edge grip end-effectors.
They could be used for:
MultiMetrixs´ sensors are very stable,
immune to ambient light, have very high reliability,
and are plug and play compatibible with popular brands.
- Wafer Mapping (including low reflective surfaces)
- Wafer edge detection
- Wafer alignment
- Detection of wafer misplacement