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Technology Products Solutions
MultiMetrixs developed a wide range of unique stand-alone and process control metrology solutions.  They range from measuring thickness and uniformity of single or stacks of conductive films to defect inspection of wafer edge exclusion zone.

Our main focus is to provide end-users with most sophisticated metrology, inspection and control solutions for widest range of applications.  Since Resonance Sensor Technology is relatively new metrology method we continue to develop new applications for both FEOL and BEOL.

Partial list of applications that we have developed to date:
  • In-Situ Process Control Solutions
  • In-Line and Stand-Alone Solutions
  • Multi Sensor Solutions
  • Bump Adhesion Solutions
Modern Technology, Superior Products, Real-World Solutions

We are confident that you will find the RST-based products and solutions to be far superior to any other existing non-contact technique in the electrical arena.  The table below shows how the modern Resonance Sensor Technology products and solutions compare to other existing products based on your real-world requirements.
Comparison of Metrology Methods
Metrology Method Company Spot Size Speed Sensitivity Accuracy Cost COO Footprint
RST MultiMetrixs              
Capacitive ADE I S I I S I S
Eddy Current Andrew NTD, ULVAC, Napson W I W W S I S
4-Point Probe KLA-Tencor, SSM, CDE, Napson, Capres W W I I S I S
X-ray Siemens, Jordan Valley, Rigaku I W S S W W W
Optoacoustics Rudolph Technology, Philips-AMS I W I I W W W
Ellipsometry ThermaWave, Horiba,
KLA-Tencor
I I S S W W W
Reflectrometry Nanometrics,
Nova Instrument
I S S S I I I
Legend: Similar (S)
±10%
Inferior (I)
> 15% - 100%
Much Worse (W)
> 100%

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